Micromachined Thermal Flow Sensors—A Review
نویسندگان
چکیده
منابع مشابه
Micromachined Thermal Flow Sensors - A Review
Microfabrication has greatly matured and proliferated in use amongst many disciplines. There has been great interest in micromachined flow sensors due to the benefits of miniaturization: low cost, small device footprint, low power consumption, greater sensitivity, integration with on-chip circuitry, etc. This paper reviews the theory of thermal flow sensing and the different configurations and ...
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ژورنال
عنوان ژورنال: Micromachines
سال: 2012
ISSN: 2072-666X
DOI: 10.3390/mi3030550